Title:
熱処理装置および熱処理方法
Document Type and Number:
Japanese Patent JP4519348
Kind Code:
B2
Inventors:
Yasushi Tanifuji
Kazushige Sakata
Kazushige Sakata
Application Number:
JP2001094585A
Publication Date:
August 04, 2010
Filing Date:
March 29, 2001
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
F27D3/12; H01L21/22; F27B5/06; H01L21/31
Domestic Patent References:
JP6314729A | ||||
JP7142391A | ||||
JP7283288A | ||||
JP9293772A | ||||
JP8213446A | ||||
JP9064150A |
Attorney, Agent or Firm:
Nobuo Kinutani
Noriyuki Kanasaka
Noriyuki Kanasaka