Title:
THERMAL TREATMENT EQUIPMENT
Document Type and Number:
Japanese Patent JP2015068635
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To keep firing temperatures different from one another of heat treatment targets applied to both surfaces of boards that are continuously conveyed, at constant temperatures respectively.SOLUTION: A firing processing device 1 includes a lamp heater 10 that irradiates and heats a top face W1 of a board W, a ceramic-based board 22 arranged so as to face the undersurface W2 of the board W, and a second heater 20 for heating the ceramic-based board 22. The firing processing device 1 also includes a first thermoelectric couple 15 for detecting the temperature of a part facing the top face W1 of the board W in a firing region 3, a second thermoelectric couple 25 for detecting the temperature of the ceramic-based board 22, and a temperature controller. The temperature controller controls output of the lamp heater 10 so that the temperature detected by the first thermoelectric couple 15 is a first prescribed temperature, and controls output of the second heater 20 so that the temperature detected by the second thermoelectric couple 25 is a second prescribed temperature.
Inventors:
KAJITANI KAZUHIRO
Application Number:
JP2013206482A
Publication Date:
April 13, 2015
Filing Date:
October 01, 2013
Export Citation:
Assignee:
KOYO THERMO SYS KK
International Classes:
F27B9/06; F27B9/36; F27B9/40; F27D11/02; F27D19/00; H01L31/04
Domestic Patent References:
| JP2006310792A | 2006-11-09 | |||
| JP2009192141A | 2009-08-27 | |||
| JP2011038683A | 2011-02-24 | |||
| JP2003343975A | 2003-12-03 |
Foreign References:
| US20080314892A1 | 2008-12-25 |
Attorney, Agent or Firm:
Patent Business Corporation Suncrest International Patent Office
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