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Title:
HEAT TREATMENT APPARATUS
Document Type and Number:
Japanese Patent JP2019100671
Kind Code:
A
Abstract:
To provide a heat treatment apparatus, even if the deposition thickness of the object to be treated in a rotary furnace is increased, improving the thermal conductivity from the furnace face side to the object to be treated while suppressing the soaring of the object to be treated without disturbing the fluidity of the object to be treated.SOLUTION: Provided is a heat treatment apparatus A comprising: an external heat type rotary furnace 1 freely rollably provided in communication with a feed port Ba and an exhaust port Bb of the object to be treated; a plurality of thermal conduction extension parts 12 provided at every prescribed intervals, respectively, in the axial direction and the circumferential direction of the rotary furnace at a furnace face 11 of the rotary furnace; an oscillation flow passage 13 for the object B to be treated smoothly provided in the circumferential direction of the rotary furnace along the furnace face of the rotary furnace; an exhaust flow passage 14 for the object B to be treated smoothly provided in the axial direction 7 of the rotary furnace along the furnace face of the rotary furnace; and an exhaust passage 3 provided at the inside of the rotary furnace so as to be communicated with an external space S2 of the rotary furnace in the axial direction of the rotary furnace, where the plurality of heat conduction extension parts have thermal conduction faces 12a infiltrating into a deposition part B1 of the object B to be treated fed into the rotary furnace and also prescribing the oscillation flow passage and the exhaust flow passage.SELECTED DRAWING: Figure 1

Inventors:
YOKOTA MICHIYA
AWANO HIDEKAZU
FURUYA MASAHIRO
Application Number:
JP2017235087A
Publication Date:
June 24, 2019
Filing Date:
December 07, 2017
Export Citation:
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Assignee:
SHIN ETSU ENG CO LTD
SHINETSU CHEMICAL CO
International Classes:
F27B7/14; F27B7/08
Attorney, Agent or Firm:
Eichi International Patent Office



 
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