Title:
熱処理装置
Document Type and Number:
Japanese Patent JP3554847
Kind Code:
B2
Abstract:
A determination unit determines the absolute exhaust pressure of an exhaust system (15), based on the pressure difference between the exhaust pressure measured by a differential pressure gage (23) and the atmospheric pressure measured by an aneroid barometer (31). A pressure-varying valve (25) is controlled according to the determined absolute exhaust pressure. An independent claim is included for heat treatment furnace.
Inventors:
Yukimasa Saito
Application Number:
JP2001230315A
Publication Date:
August 18, 2004
Filing Date:
July 30, 2001
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
C23C16/455; C23C16/44; C23C16/52; F27B5/16; F27B5/18; F27D7/06; F27D19/00; H01L21/00; H01L21/22; H01L21/31; (IPC1-7): H01L21/31; C23C16/455; F27B5/16; F27B5/18; F27D7/06; F27D19/00; H01L21/22
Domestic Patent References:
| JP10330943A | ||||
| JP11118657A | ||||
| JP200222592A | ||||
| JP264430A | ||||
| JP4320938A |
Attorney, Agent or Firm:
Noriyuki Kanasaka