Title:
熱処理装置
Document Type and Number:
Japanese Patent JP4003205
Kind Code:
B2
Inventors:
Shohei Tsuji
Atsushi Hiura
Atsushi Hiura
Application Number:
JP2001002105A
Publication Date:
November 07, 2007
Filing Date:
January 10, 2001
Export Citation:
Assignee:
Koyo Thermo System Co., Ltd.
International Classes:
F27B5/04; F27B5/14; F27B5/16; F27D7/02; H01L21/205
Domestic Patent References:
| JP2000286535A | ||||
| JP11506821A | ||||
| JP11126744A |
Attorney, Agent or Firm:
Einosuke Kishimoto
Moriichi Kishimoto
Akira Watanabe
Norihiko Hibi
Kiyosue Yasuko
Moriichi Kishimoto
Akira Watanabe
Norihiko Hibi
Kiyosue Yasuko