Title:
熱処理装置
Document Type and Number:
Japanese Patent JP4015791
Kind Code:
B2
Inventors:
Hiroyuki Yamamoto
Application Number:
JP32659399A
Publication Date:
November 28, 2007
Filing Date:
November 17, 1999
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/205; H01L21/22; F27B5/10; F27D1/00; F27D7/06; H01L21/324
Domestic Patent References:
| JP5291158A | ||||
| JP6196421A | ||||
| JP10223538A | ||||
| JP8162447A | ||||
| JP5299357A | ||||
| JP5251373A |
Attorney, Agent or Firm:
Nobuo Kinutani
Noriyuki Kanasaka
Noriyuki Kanasaka