Title:
熱処理装置
Document Type and Number:
Japanese Patent JP4017276
Kind Code:
B2
Inventors:
Kiyohiro Sasaki
Application Number:
JP3299799A
Publication Date:
December 05, 2007
Filing Date:
February 10, 1999
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
F27D7/06; H01L21/683; F27B5/04; F27B5/14; F27B5/18; F27D7/02; H01L21/205; H01L21/68
Domestic Patent References:
| JP5021577A | ||||
| JP8191097A |
Attorney, Agent or Firm:
Shigeaki Yoshida
Yoshitake Hidetoshi
Takahiro Arita
Yoshitake Hidetoshi
Takahiro Arita