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Title:
熱処理装置
Document Type and Number:
Japanese Patent JP4963336
Kind Code:
B2
Inventors:
Yukimasa Saito
Takanori Saito
Application Number:
JP2001257187A
Publication Date:
June 27, 2012
Filing Date:
August 28, 2001
Export Citation:
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Assignee:
東京エレクトロン株式会社
International Classes:
C23C16/455; H01L21/205; C23C16/44; F27B5/16; F27D17/00; H01L21/22; H01L21/31
Domestic Patent References:
JP8227883A
JP9027488A
Foreign References:
WO1998030731A1
Attorney, Agent or Firm:
Nobuo Kinutani
Noriyuki Kanasaka



 
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