Title:
熱処理装置
Document Type and Number:
Japanese Patent JP5773815
Kind Code:
B2
Inventors:
Kenta Kurooka
Application Number:
JP2011197817A
Publication Date:
September 02, 2015
Filing Date:
September 12, 2011
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
F27D11/02; F27B17/00; H01L21/027
Domestic Patent References:
| JP6267840A | ||||
| JP2007158253A | ||||
| JP2008066645A |
Attorney, Agent or Firm:
Takashi Otsubo
Sachiko Muraguchi
Sachiko Muraguchi