Title:
Thermal treatment equipment
Document Type and Number:
Japanese Patent JP5951438
Kind Code:
B2
Abstract:
The present invention provides a heat treatment device capable of saving energy and providing diversity of electricity supply. The heat treatment device 1 includes a heat treatment furnace 2, a thermoelectric conversion component 3, a control device 4 and a switching part 5. The heat treatment furnace 2 is provided for performing heat treatment to an object 100 under treatment. The thermoelectric conversion component 3 converts heat energy from the heat treatment furnace 2 into electricity. The control device 4 is provided for controlling the heat treatment furnace 2. The switching part 5 selectively provides the electricity from an external power source 20 or the electricity from the thermoelectric conversion component 3 to the control device 4.
Inventors:
Mukai Masayuki
Application Number:
JP2012222863A
Publication Date:
July 13, 2016
Filing Date:
October 05, 2012
Export Citation:
Assignee:
Koyo Thermo System Co., Ltd.
International Classes:
F27D17/00; H01L21/02; H01L21/027; H01L21/22; H01L21/324; H01L35/28; H01L35/30
Domestic Patent References:
| JP2008032341A | ||||
| JP6154589A | ||||
| JP2000068183A | ||||
| JP2013201830A | ||||
| JP3160926U | ||||
| JP2002171776A |
Foreign References:
| US20130048045 |
Attorney, Agent or Firm:
Patent Corporation Wandee ip Partners