Thermal treatment equipment - Toray Engineering Co., Ltd.

Title:

Thermal treatment equipment

Document Type and Number:

Japanese Patent JP5988359

Kind Code:

B2

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Inventors:

Daisuke Okuda
Shunichi Okamoto
Toshihiro Mori
Shigeo Uchigata
Takeshi Hamakawa
Miyajima Yuya

Application Number:

JP2012159325A

Publication Date:

September 07, 2016

Filing Date:

July 18, 2012

Export Citation:

Assignee:

Toray Engineering Co., Ltd.

International Classes:

H01L21/027; F26B15/12; H01L21/677

Domestic Patent References:

Previous Patent: A drying method of the coating film used for a lithium secondary battery

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