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Patent Searching and Data


Title:
Thermal treatment equipment
Document Type and Number:
Japanese Patent JP6088909
Kind Code:
B2
Inventors:
西 幸治
Application Number:
JP2013117767A
Publication Date:
March 01, 2017
Filing Date:
June 04, 2013
Export Citation:
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Assignee:
株式会社SCREENセミコンダクターソリューションズ
International Classes:
H01L21/02; F28D19/04; H01L21/027; H01L21/683
Domestic Patent References:
JP2012238690A
JP2012079940A
JP2004014655A
JP2006135130A
JP2011129577A
JP2013251329A
Attorney, Agent or Firm:
杉谷 勉
戸高 弘幸
杉谷 知彦
栗原 要