Title:
熱処理装置
Document Type and Number:
Japanese Patent JP6438331
Kind Code:
B2
Inventors:
Masashi Furukawa
Makoto Abe
Hideaki Tanimura
Makoto Abe
Hideaki Tanimura
Application Number:
JP2015051700A
Publication Date:
December 12, 2018
Filing Date:
March 16, 2015
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/26; B65G49/07; F27B5/14; F27B17/00; F27D11/02; H01L21/677; H01L21/683
Domestic Patent References:
| JP3291940A | ||||
| JP2014120509A | ||||
| JP2009123807A | ||||
| JP2011040544A | ||||
| JP2009272399A | ||||
| JP2002217110A | ||||
| JP2012174879A | ||||
| JP8064544A | ||||
| JP2000138170A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita