Title:
熱処理装置
Document Type and Number:
Japanese Patent JP6670405
Kind Code:
B2
Abstract:
To improve durability of a door opening and closing mechanism of a horizontal furnace in a thermal treatment device.SOLUTION: A thermal treatment device 1 comprises: a horizontal furnace 3 which has laterally arranged opening section 7a and a door 2; and an opening and closing mechanism 6 to open and close the door 2. The opening and closing mechanism 6 has: a linear motion actuator 34 which has an output section 39 configured to move in a straight line and is horizontally arranged; and a link mechanism 35. The link mechanism 35: converts linear motion of the output section 39 into swaying motion around a predetermined first axial line S1 extended in a vertical direction; and transmits the swaying motion to the door 2.SELECTED DRAWING: Figure 1
Inventors:
Shinichi Ikeda
Fumio Umeda
Nishioka Masahiro
Yoshihiko Urasaki
Fumio Umeda
Nishioka Masahiro
Yoshihiko Urasaki
Application Number:
JP2019011734A
Publication Date:
March 18, 2020
Filing Date:
January 25, 2019
Export Citation:
Assignee:
Koyo Thermo System Co., Ltd.
International Classes:
H01L21/31; C23C16/44; F27B5/06; F27D1/18; H01L21/205; H01L21/22; H01L21/324
Domestic Patent References:
| JP7263362A | ||||
| JP2012063130A | ||||
| JP64046633U | ||||
| JP6302679A | ||||
| JP4123252U | ||||
| JP62127496U |
Attorney, Agent or Firm:
Patents corporation Blitas