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Title:
THERMAL TYPE ELEMENT AND METHOD FOR DETERMINING RESISTANCE VALUE TEMPERATURE COEFFICIENT OF TEMPERATURE MEASURING RESISTOR IN THERMAL ELEMENT
Document Type and Number:
Japanese Patent JP2013195151
Kind Code:
A
Abstract:

To provide a thermal type element capable of determining a resistance value temperature coefficient of a temperature measuring resistor with a simple measurement.

A thermal element 10 comprises: a first temperature measuring resistor 3 for detection; a second temperature measuring resistor 5 for temperature coefficient measurement; and a diode 7. The first temperature measuring resistor 3 is arranged so as to be bridged over a cavity 1a formed on a semiconductor substrate 1. The second temperature measuring resistor 5 is arranged at a position different from the cavity 1a on the semiconductor substrate 1. The second temperature measuring resistor 5 has the same resistance value temperature coefficient as the resistance value temperature coefficient of the first temperature measuring resistor 3. The diode 7 is formed by a P-type region 7p+ and an N-type region 7n which are formed on the semiconductor substrate 1. The diode 7 is arranged at a lower part of the second temperature measuring resistor 5.


Inventors:
SETO MASAMI
Application Number:
JP2012060776A
Publication Date:
September 30, 2013
Filing Date:
March 16, 2012
Export Citation:
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Assignee:
RICOH CO LTD
International Classes:
G01K15/00; B81B1/00; G01N25/64; H01L37/00
Attorney, Agent or Firm:
Shigeo Noguchi