To provide a thermal type flowmeter which has a high reliability and a low cost.
The thermal type flowmeter is provided with: a flow rate detecting element having at least a heat generating resistor and a lead electrode formed on a surface of a tabular substrate; and a support body having a concave portion for accommodating the flow rate detecting element being formed on a surface, wherein the flow rate detecting element is firmly fixed and accommodated by an adhesive agent in a back surface of the tabular substrate and a part of a bottom surface of the concave portion. In the thermal type flow meter, an approximately straight discharge groove which is deeper than a bottom surface of the concave portion and passes through both end surfaces in upward and downward sides of the concave portion, is formed from the upstream side of the support body concave portion to the downstream side, between the cavity of the tabular substrate and the back surface region of the tabular substrate in which the lead electrode is formed.
MATSUMOTO MASAHIRO
NAKANO HIROSHI
YASUKAWA AKIO
WATANABE IZUMI
| JPH0926343A | 1997-01-28 | |||
| JP3545637B2 | 2004-07-21 | |||
| JP2001508879A | 2001-07-03 | |||
| JP2001249041A | 2001-09-14 | |||
| JP2001091322A | 2001-04-06 | |||
| JP2001012987A | 2001-01-19 | |||
| JP2000275076A | 2000-10-06 |