Title:
THERMAL TYPE INFRARED DETECTOR AND INFRARED FOCAL PLANE ARRAY
Document Type and Number:
Japanese Patent JP3944465
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a highly accurate and low-noise thermal type infrared detector of a new structure.
SOLUTION: A temperature sensor 103 of which the electric characteristics change according to temperature changes due to the absorption of infrared rays; a heat insulating support leg 102 for thermally insulating and supporting the temperature sensor 103 to be a wire for reading an electric signal from the temperature sensor 103; and an infrared absorbing layer 101 formed in such a way as to be thermally in contact with the temperature sensor 103 are provided over a substrate 105. The temperature sensor 103; the heat insulating support leg 102; and the infrared absorbing layer 101 are formed in planes spatially separated and different from each other.
Inventors:
Tomohiro Ishikawa
Masashi Ueno
Masashi Ueno
Application Number:
JP2003107677A
Publication Date:
July 11, 2007
Filing Date:
April 11, 2003
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
G01J1/02; G01J5/02; G01J5/10; G01J5/20; G01J5/48; H01L27/14; H01L37/00; (IPC1-7): G01J1/02; G01J5/02; G01J5/48; H01L27/14; H01L37/00
Domestic Patent References:
| JP2000019010A | ||||
| JP11218442A | ||||
| JP10185681A |
Foreign References:
| WO1999031471A1 |
Attorney, Agent or Firm:
Samejima Mutsumi
Kyousei Tamura
Kei Tamura
Masahiro Ishino
Kyousei Tamura
Kei Tamura
Masahiro Ishino