PURPOSE: To provide a thermally driven type relay which can correspond to ultra-miniatorization a with simple mechanism and can be driven in the same condition across the whole range of applied voltages from low voltage to high voltage.
CONSTITUTION: A thermally driven type relay is composed of a fixed piece 11 having fixed contact points 14, 14' and a movable piece 1 whose one end is movably supported and provided with a movable part 3 having a movable contact point 9 on its tip. Two slits 2, 2' extended toward the tip end of the movable part 3 are formed in parallel in the movable part 3 of the movable piece 1. A heater 5 is arranged in the movable part 3 of the movable piece 1 so as to lie between the two slits 2, 2' along the longitudinal direction. The movable part 3 of the movable piece 1 is divided by the two slits 2, 2' into three parts consisting of a center part 10 and both side parts 4, 4' and the heater 5 is set in a series in the center part 10. The movable piece 1 is made of silicon and the heater 5 is formed of a semiconductive P+ layer constructed by diffusing impurities.
KASANO FUMIHIRO
NISHIMURA HIROMI
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