Title:
THERMALLY SPRAYED CERAMIC FILM AND CORROSION-RESISTANT MEMBER USING THE SAME
Document Type and Number:
Japanese Patent JP2010018853
Kind Code:
A
Abstract:
To provide a thermally sprayed ceramic film which is excellent in corrosion resistance to halogen gases, has a controlled volume resistivity, and is suitable as a member of a semiconductor manufacturing apparatus or the like.
The thermally sprayed ceramic film is a spinel-based thermally sprayed ceramic film comprising, as main components, MgO and Al2O3, and is characterized in that the mass ratio (MgO/Al2O3) of MgO to Al2O3 is 0.25-1.5, the volume resistivity is 1108 to 11014 cm, and the lattice constant satisfied a=8.084 .
Inventors:
Ishida, Hironori
Saito, Chikashi
Kitabayashi, Tetsuo
Saito, Chikashi
Kitabayashi, Tetsuo
Application Number:
JP2008000181155
Publication Date:
January 28, 2010
Filing Date:
July 11, 2008
Export Citation:
Assignee:
TAIHEIYO CEMENT CORP
NIHON CERATEC CO LTD
NIHON CERATEC CO LTD
International Classes:
C23C4/10; C04B41/87; C23C4/10; C04B41/87