To provide a thermochemical vapor phase deposition system and to provide a synthesizing method for carbon nanotubes using the same.
This thermochemical vapor phase deposition system contains a belt 600 rotating while being successively loaded with many substrates 100, a rotary part 650 for rotating the belt 600, a loading part 210 for successively loading the substrates 100 onto the belt 600, a recovering part 250 set oppositely to the loading part 210 and recovering the substrates 100 transported by the rotation of the belt 600, first and second reaction gas feeding parts 450 and 460 for feeding reaction gas for synthesizing carbon nanotubes onto the substrates 100 moving along the belt 600, a substrate heating part 700 for heating the substrates 100 loaded on the belt 600 for the thermal reaction of the reaction gas and a fan as a part for exhausting the reaction gas.
YOO JAE-EUN
ILJIN NANOTECH CO LTD