Title:
THERMOCOMPRESSION BONDING TOOL
Document Type and Number:
Japanese Patent JPS61158154
Kind Code:
A
Abstract:
PURPOSE:To perform highly reliable thermocompression bonding process eliminating any metallic fusion between bonded element and thermocompression bonding tool by means of providing a ceramic coating layer on the compression bonding surface of thermocompression bonding tool. CONSTITUTION:Bonding surface of thermocompression bonding tool main body 8 is coated with a ceramic coating layer e.g. a ceramic coated layer 9 is provided on said main body 8 made of Mo material and stainless material. The coating layer is around 0.1-0.2mm thick. Through these procedures, any metallic fusion between heated thermocompression bonding tool and film carrier inner lead etc. during thermocompression bonding process may be eliminated.
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Inventors:
KABESHITA AKIRA
YOSHIDA TAKEICHI
YOSHIDA TAKEICHI
Application Number:
JP28039884A
Publication Date:
July 17, 1986
Filing Date:
December 28, 1984
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
H01L21/603; H01L21/60; (IPC1-7): H01L21/60
Domestic Patent References:
| JPS59159538A | 1984-09-10 |
Attorney, Agent or Firm:
Akira Kobiji (2 outside)