Title:
熱電対構造、熱処理装置及び熱電対構造の製造方法
Document Type and Number:
Japanese Patent JP7308699
Kind Code:
B2
Abstract:
A thermocouple structure according to one aspect of the present disclosure includes a first element wire, second element wires formed of a material different from the first element wire, an insulating covering member covering at least one of the first element wire and the second element wires, and a protective tube accommodating the first element wire and the second element wire. Each of the second element wires is bonded to a different position on the first element wire.
More Like This:
| JPH06104493 | COATED THERMOCOUPLE |
Inventors:
Hisashi Inoue
Masatoshi Kobayashi
Yasuaki Kikuchi
Tatsuya Yamaguchi
Koji Yoshii
Kensuke Morita
Jun Itabashi
Masatoshi Kobayashi
Yasuaki Kikuchi
Tatsuya Yamaguchi
Koji Yoshii
Kensuke Morita
Jun Itabashi
Application Number:
JP2019160679A
Publication Date:
July 14, 2023
Filing Date:
September 03, 2019
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
G01K7/02; H01L21/31
Domestic Patent References:
| JP59125851U | ||||
| JP45011103Y1 | ||||
| JP57086439U | ||||
| JP60083933U | ||||
| JP2017032406A | ||||
| JP2008058089A | ||||
| JP2009075003A | ||||
| JP2016157930A | ||||
| JP2011151055A |
Foreign References:
| WO2015041315A1 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito