Title:
THERMOELECTRIC CONVERSION ELEMENT AND PYROELECTRIC SENSOR
Document Type and Number:
Japanese Patent JP2016225421
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a thermoelectric conversion element capable of achieving improvement in sensitivity.SOLUTION: A thermoelectric conversion element 300 comprises: a first electrode 60 provided on a substrate 10; a pyroelectric film 70 being provided on the first electrode 60, consisting of a complex oxide having an ABOtype perovskite structure and generating a surface charge by a change in temperature; and a second electrode 80 provided on the pyroelectric film 70. The complex oxide constituting at least a partial layer 70 m out of the pyroelectric film 70 includes at least Pb, Nb and Ti and consists of a tetragonal crystal (100)-oriented to the substrate 10.SELECTED DRAWING: Figure 4
Inventors:
YONEMURA TAKAYUKI
HARA HISAKI
HARA HISAKI
Application Number:
JP2015109077A
Publication Date:
December 28, 2016
Filing Date:
May 28, 2015
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H01L37/02; G01J1/02; G01J1/44
Attorney, Agent or Firm:
Hiroyuki Kurihara
Mountain Saki Yuichiro
Mountain Saki Yuichiro