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Title:
熱電材料測定装置
Document Type and Number:
Japanese Patent JP4595073
Kind Code:
B2
Abstract:

To provide a thermoelectric material measuring device and a measuring method that measure thermoelectric power distribution of the thermoelectric material and can measure thermal conductivity.

The thermoelectric material measuring device comprises an optical camera for photographing a measured surface of a material to be measured, a probe mounted with a heating heater, a stage mechanism for mounting the material to be measured and positioning a measuring point, a controller for driving them, and a data processor for performing data processing of the measured data. The thermoelectric material measuring device collects local thermal conductivity, thermoelectric power, and surface optical image of the sample to be measured by one measurement, and analyzes the correlation between two-dimensional plane position information and the thermophysical property value. In the thermoelectric material measuring device, the measurement of the local thermal conductivity and thermoelectric power of the sample to be measured is performed by accurately estimating the surface temperature of the sample to be measured of a probe contact point using heat flow measured by a minute heat flow meter incorporated into a heated probe.

COPYRIGHT: (C)2008,JPO&INPIT


Inventors:
Jun Yamamoto
Application Number:
JP2006230466A
Publication Date:
December 08, 2010
Filing Date:
August 28, 2006
Export Citation:
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Assignee:
National Institute of Advanced Industrial Science and Technology
International Classes:
G01N25/00; G01K7/02; G01K17/00; G01N25/18; H01L35/28
Domestic Patent References:
JP11264718A
JP2002131260A
JP11183414A
JP2004003872A
Foreign References:
WO2003044509A1
Other References:
山本淳, LEE Chul-Ho, 上野和夫, 小原春彦,サーマルプローブ法を利用した熱物性計測-熱電材料の計測事例,Thermophys Prop,日本,2005年11月 9日,Vol.26th,Page.367-369