To suppress the decreases of measurement precision and positioning precision due to temperature variation by simplifying constitution and attaining high-precision temperature control with good response.

A stator 7 having a coil 8 as a heat generating element of a linear motor which drives a wafer stage vertically is fitted to a base member 9 through a Peltier element 20 and supplied with a refrigerant 19 whose temperature is controlled by a cooling means 17. A cooling quantity control means 13 predicts the heating value and temperature of the coil 8 according to a control signal for the exposure operation, etc., of a controller 11 and sends the result to the cooling means 17 and Peltier element 20; and the Peltier element 20 conducts the heat generated by the coil 8 from the stator 7 to the base member 9 and the cooling means 17 supplies the refrigerant 19 to the stator 7 while controlling the temperature and flow rate of the refrigerant 19 so that temperature variation of a mover 5 and the stage becomes minimum. Consequently, the heat generated by the coil 8 is absorbed to realize the high- precision temperature control.