Title:
THICKNESS MEASURING DEVICE
Document Type and Number:
Japanese Patent JP2022190525
Kind Code:
A
Abstract:
To optimize calibration timing by detecting a variation in a detection value of the amount of radiation by a temperature factor.SOLUTION: A thickness measuring device includes: a radiation generator for applying radiation beams; multiple radiation detectors that are disposed so as to oppose the radiation generator and detect the amount of radiation of incident radiation beams; and an operation part for calculating first and second statistical values for each of multiple radiation detectors by a first calculation method on the basis of first and second detection value data acquired from the multiple radiation detectors, and for generating a first signal for showing that a variation occurs because of a temperature factor when the second statistical value varies much more than the first statistical value with an amount exceeding a threshold in one of multiple radiation detectors and a relation in a level of the second statistical value among multiple radiation detectors is the same as a relation in a level of the first statistical value among multiple radiation detectors.SELECTED DRAWING: Figure 1
Inventors:
KAWASHIMA YUKI
Application Number:
JP2021098891A
Publication Date:
December 26, 2022
Filing Date:
June 14, 2021
Export Citation:
Assignee:
TOSHIBA CORP
TOSHIBA INFRASTRUCTURE SYSTEMS & SOLUTIONS CORP
TOSHIBA INFRASTRUCTURE SYSTEMS & SOLUTIONS CORP
International Classes:
G01B15/02
Attorney, Agent or Firm:
Sakai International Patent Office