Title:
薄膜音響共振器及びその製造方法
Document Type and Number:
Japanese Patent JP4345049
Kind Code:
B2
Abstract:
A method of producing a thin film bulk acoustic resonator having a piezoelectric layer, a first electrode joined to a first surface of the piezoelectric layer, and a second electrode joined to a second surface of the piezoelectric layer, which is located at the opposite side to the first surface, including the steps of forming a pit on a surface of a substrate; filling the pit with a sacrificial layer; polishing a surface of the sacrificial layer so that the RMS variation of a height of the surface of the sacrificial layer is equal to 25 nm or less; forming the first electrode over a partial area of the surface of the sacrificial layer and a partial area of the surface of the substrate; forming the piezoelectric layer on the first electrode so that RMS variation of a height of the second surface of the piezoelectric layer is equal to 5% or less of a thickness of the piezoelectric layer; forming the second electrode on the piezoelectric layer; and removing the sacrificial layer from the inside of the pit by etching.
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Inventors:
Tetsuo Yamada
Keigo Nagao
Chisen Hashimoto
Keigo Nagao
Chisen Hashimoto
Application Number:
JP2002590142A
Publication Date:
October 14, 2009
Filing Date:
May 10, 2002
Export Citation:
Assignee:
Ube Industries,Ltd.
International Classes:
B06B1/06; H03H9/17; G10K11/04; H04R19/02; G10L25/90; H01L41/08; H01L41/09; H01L41/18; H01L41/22; H01L41/313; H03H3/02; H03H9/02; H03H9/05; H03H9/56; H03H9/58; H04R31/00; H03H9/13
Domestic Patent References:
| JP2005236337A | ||||
| JP11340775A | ||||
| JP2001313535A | ||||
| JP2000069594A |
Attorney, Agent or Firm:
Jyohei Yamashita