Title:
THIN FILM BODY BRIDGE STRUCTURE
Document Type and Number:
Japanese Patent JPH05231970
Kind Code:
A
Abstract:
PURPOSE:To obtain a structure which can well prevent a distortion due to residual stress or breakage from occurring in a thin film bridge structure. CONSTITUTION:On a face opposite to a face where a function thin film 7 such as a resistor made of platinum of a thin film bridge 4 comprising a thin silicon nitride film, a compensating film 8 made of silicon nitride with its material or thickness or a formation pattern set is formed so that residual stress of the function film 7, a direction or size indicate substantially same residual stress. Components largely influencing distortion or damage of the thin bridge 4 among residual stress of the function film 7 are eliminated by residual stress of the compensating film 8.
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Inventors:
AIZAWA KOICHI
SAKAI ATSUSHI
AWAI TAKAYOSHI
ISHIDA TAKUO
KAKINOTE KEIJI
SAKAI ATSUSHI
AWAI TAKAYOSHI
ISHIDA TAKUO
KAKINOTE KEIJI
Application Number:
JP3811192A
Publication Date:
September 07, 1993
Filing Date:
February 25, 1992
Export Citation:
Assignee:
MATSUSHITA ELECTRIC WORKS LTD
International Classes:
G01L9/04; B81B1/00; G01L9/00; H01L29/84; (IPC1-7): G01L9/04; H01L29/84
Attorney, Agent or Firm:
Takehiko Matsumoto