To realize a thin film capacitor with tight adhesion between layers in a lower electrode, a high dielectric film and an upper electrode or high tight adhesion with another layer and superior high frequency characteristics.

The thin film capacitor includes the lower electrode, the high dielectric film provided on the lower electrode, and the upper electrode provided on the high dielectric film. In the capacitor, a plurality of openings are provided for at least one of the upper electrode, the high dielectric film, and the lower electrode. Particularly, the plurality of openings are provided for the upper electrode covered with an insulating film.