To provide a thin-film capacitor and a variable capacitor having excellent moisture-resistance reliability, and electronic components using them.
The thin-film capacitor has a capacitance generation section which consists of sequential deposits of a lower electrode layer 2, dielectric layer 3, and an upper electrode layer 4 on a support substrate 1, and is covered with an insulator layer 5, wherein at least one of the lower and upper electrode layers 2 and 4 has a top lower than a bottom, and sides as slopes having streaky, continuous irregularity in a vertical direction. Thus, the insulator layer 5 is effectively prevented from being peeled from sides of the lower and upper electrode layers 2 and 4, resulting in high moisture-resistance reliability.
KURIOKA HIDEJI
TAKI KENJI
IIOKA ATSUHIRO
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