Title:
THIN FILM COATER
Document Type and Number:
Japanese Patent JPS5397041
Kind Code:
A
Abstract:
PURPOSE: To apply a thin film of a photo-resist, etc., with uniform thickness, to a substrate placed on a spinning table, by furnishing the table with a universal swibelling mechanism.
Inventors:
KINOSHITA YASUO
Application Number:
JP1140077A
Publication Date:
August 24, 1978
Filing Date:
February 03, 1977
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
B05C11/08; B05C9/02; B05D1/40; G03C1/74; G03F7/16; H01L21/027; H01L21/312; (IPC1-7): B05C9/02; G03C1/74; G03F7/16; H01L21/312