Title:
蒸着装置、蒸着方法、液晶装置の製造方法
Document Type and Number:
Japanese Patent JP4000823
Kind Code:
B2
Inventors:
Takaaki Tanaka
Application Number:
JP2001333406A
Publication Date:
October 31, 2007
Filing Date:
October 30, 2001
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
C23C14/24; G02F1/13; G02F1/1337; G02F1/1368
Domestic Patent References:
| JP63172121A | ||||
| JP10154325A | ||||
| JP63132201A | ||||
| JP53054041A | ||||
| JP61028928A |
Attorney, Agent or Firm:
Takashi Watanabe
Masatake Shiga
Shinya Mitsuhiro
Masatake Shiga
Shinya Mitsuhiro