蒸着方法及び蒸着装置

Title:

蒸着方法及び蒸着装置

Document Type and Number:

Japanese Patent JP5154245

Kind Code:

B2

Inventors:

Makoto Adachi
Shinichi Tanabe
Yutaka Ichikura

Application Number:

JP2008017822A

Publication Date:

February 27, 2013

Filing Date:

January 29, 2008

Export Citation:

Assignee:

HOYA CORPORATION

International Classes:

C23C14/48; C23C14/24; G02B1/11; G02B1/115

Domestic Patent References:

Attorney, Agent or Firm:

Yoshitsuno Kakuda
Hitoshi Ito

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