To obtain an electrostatic chuck which displays a large attraction force over a wide temperature range, by a method wherein an aluminum nitride film which is formed by a vapor-phase synthetic method is formed as an attraction layer on the surface of an electrode layer or on the surface of a dielectric on which an electrode layer is formed.
In this thin film electrostatic chuck 1, an aluminum nitride film 2 is formed as an attraction layer on the surface of an electrode layer 3 which is formed of a metal, a conductive ceramic or the like by using a laser MOCVD method as one kind of a vapor-phase synthetic method. Alternatively, a dielectric 4 is formed on an electrode layer 3, an aluminum nitride layer 2 is formed as an attraction layer on the surface of their two-layer structure, and a three-layer structure is formed. As a result, it is possible to form the electrostatic chuck whose attractive force is not interior to that of a ceramic-based electrostatic chuck, whose resistivity is not lowered even at a high temperature and which displays a large attractive force over a wide temperature range.
KANEKO KAYU
MORIKAWA SHIGERU
FUJII TAKAMITSU
KAJIMURA ATSUKO
KANSAI RES INST