Title:
薄膜圧電アクチュエータ
Document Type and Number:
Japanese Patent JP4496091
Kind Code:
B2
Abstract:
A thin film piezoelectric actuator comprises a driving part at least one end of which is supported by an anchor portion. The driving part includes: a piezoelectric film, a first lower electrode provided under a first region of the piezoelectric film, a second lower electrode provided under a second region different from the first region of the piezoelectric film, a first upper electrode provided opposite to the first lower electrode on the piezoelectric film, a second upper electrode provided opposite to the second lower electrode on the piezoelectric film, a first connection part that electrically connects the first lower electrode and the second upper electrode via a first via hole formed in the piezoelectric film, and a second connection part that electrically connects the second lower electrode and the first upper electrode via a second via hole formed in the piezoelectric film.
Inventors:
Takashi Kawakubo
Ryoichi Ohara
Tomio Ono
Toshihiko Nagano
Kazuhide Abe
Toruhiko Nishigaki
Kenya Sano
Yasuaki Yasumoto
Ryoichi Ohara
Tomio Ono
Toshihiko Nagano
Kazuhide Abe
Toruhiko Nishigaki
Kenya Sano
Yasuaki Yasumoto
Application Number:
JP2005003370A
Publication Date:
July 07, 2010
Filing Date:
January 11, 2005
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
H01L41/09; H01G7/06; H01L41/053; H01L41/08; H01L41/18; H01L41/187; H01L41/22; H01L41/29; H01L41/316
Domestic Patent References:
| JP9148643A | ||||
| JP2002191181A | ||||
| JP2004111939A |
Attorney, Agent or Firm:
Masahiko Hinataji