PURPOSE: To stabilize a thin film by changing-over revolution of a a panel according to the panel size and kind while moving the panel from a slurry developing position to a slurry recovering position.

CONSTITUTION: A panel 1 held by a carrier head 3 is moved from a slurry developing position 12 to a slurry recovering position 13 by a link mechanism 4. While said panel 1 is moving, a DC motor 9 drives a transfer belt 8 so as to rotate a roller 5 and the carrier head 3 by a movement of said transfer belt 8 for rotating the panel 1. A signal from a sequencer 11 together with the kind signal of the panel 1 are sent to a DC control unit 10 for rotating the DC motor 9 with a member of revolution corresponding to the panel size and kind set up on the DC control unit 10. Thereby, film unevenness is reduced so as to form a stable thin film.