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Patent Searching and Data


Title:
THIN FILM FORMING DEVICE
Document Type and Number:
Japanese Patent JPH06112470
Kind Code:
A
Abstract:

PURPOSE: To form a Langmuir-Blodgett film (LB film) where molecules are three-dimensionally control led in arrangement.

CONSTITUTION: A thin film forming device is composed of a water tank 1 where a monomolecular film 2 is spread over lower liquid 3, a probe 7, a piezoelectric element 8 which controls the three-dimensional fine movement of the probe 7, a drive 10 used for driving the probe 7 and the piezoelectric element 8 in a wide range of movement, and a control 9 which controls these component parts, and the monomolecular film 2 is locally modified by a tunnel current which flows between the probe 7 and the film 2. Molecules forming the monomolectular film 2 are moved by the probe 7. Therefore, a film where molecules are three-dimensionally controlled in arrangement can be formed, so that an LB film can be given new functions.


Inventors:
YOSHIMURA TOSHIYUKI
MIURA NAOKO
OKAZAKI SHINJI
Application Number:
JP26110992A
Publication Date:
April 22, 1994
Filing Date:
September 30, 1992
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
H01L51/05; H01L51/40; (IPC1-7): H01L29/28
Attorney, Agent or Firm:
Ogawa Katsuo