Title:
THIN-FILM LAMINATE AND OXIDE SUPERCONDUCTING CONDUCTOR AND THEIR PRODUCTION
Document Type and Number:
Japanese Patent JP3447077
Kind Code:
B2
Abstract:
PURPOSE: To provide a thin film laminate having polycrystallinc thin films for orientation control having excellent crystal orientability and the oxide superconducting conductor formed by utilizing this laminate and to provide a process capable of producing the laminate and the conductor at a high film forming speed.
CONSTITUTION: This thin film laminate has a base material A, the rapidly formed polycrystalling thin film B which is formed on the film forming surface of this base material A and is bonded with many crystal grains and the polycrystalling thin film C for orientation control which is formed in this rapidly formed polycrystalling thin film B, is formed thinner than the rapidly formed polycrystalling thin film B and has ≤30° grain boundary inclination. Since this laminate has the polycrystalling thin film C for orientation control having ≤30° grain boundary inclination on the base material, the crystalline structures of the thin films to be formed thereon are aligned. The oxide superconducting conductor having excellent superconducting characteristics is, therefore, obtd. Since the laminate has the rapidly formed polycrystalling thin film, the thick laminate is obtd. in a short film forming time.
Inventors:
Yasuhiro Iijima
Nobuo Tanabe
Takashi Saito
Nobuo Tanabe
Takashi Saito
Application Number:
JP6018893A
Publication Date:
September 16, 2003
Filing Date:
March 19, 1993
Export Citation:
Assignee:
Fujikura Ltd.
International Classes:
C01G1/00; C01G3/00; C23C14/06; C23C14/08; C23C14/34; C30B23/08; C30B29/22; (IPC1-7): C30B29/22; C01G1/00; C01G3/00; C30B23/08
Domestic Patent References:
| JP4104411A | ||||
| JP524996A | ||||
| JP1197396A | ||||
| JP254757A | ||||
| JP3242396A | ||||
| JP472062A | ||||
| JP4302506A | ||||
| JP4329865A | ||||
| JP4331795A |
Attorney, Agent or Firm:
Masatake Shiga (3 outside)