Title:
THIN FILM-LIKE CONTINUOUS SPATIALLY MODULATED GRAY ATTENUATOR AND FILTER
Document Type and Number:
Japanese Patent JP2009124143
Kind Code:
A
Abstract:
To provide a lithographic apparatus which is simpler and lower in cost than those of prior art, using a conventional filter having sub-micron sized dots.
In this system and method for use of a lithographic apparatus having a substrate and an absorbing film formed on the substrate, the thickness of the absorbing film is spatially adjusted, across at least a part of the substrate so as to reduce the intensity nonuniformity of a radiation beam transmitted through the substrate.
Inventors:
VLADMIRSKY YULI
RYZHIKOV LEV
WILKLOW RONALD A
RYZHIKOV LEV
WILKLOW RONALD A
Application Number:
JP2008288058A
Publication Date:
June 04, 2009
Filing Date:
November 10, 2008
Export Citation:
Assignee:
ASML HOLDING NV
International Classes:
H01L21/027; G02B3/00; G02B5/00; G02B19/00; G03F7/20
Domestic Patent References:
| JP2005108892A | 2005-04-21 | |||
| JPH11317356A | 1999-11-16 | |||
| JP2005310909A | 2005-11-04 | |||
| JPH06204111A | 1994-07-22 | |||
| JP2007279113A | 2007-10-25 | |||
| JP2002286989A | 2002-10-03 | |||
| JP2003050311A | 2003-02-21 | |||
| JP2003262750A | 2003-09-19 |
Attorney, Agent or Firm:
Sakaki Morishita
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