THIN FILM MAGNETIC HEAD DEVICE AND MANUFACTURING METHOD THEREOF

Title:

THIN FILM MAGNETIC HEAD DEVICE AND MANUFACTURING METHOD THEREOF

Document Type and Number:

Japanese Patent JP2003217102

Kind Code:

A

Abstract:

To work only a desired area for flattening with a high through-put on a surface of a magnetic head element part of the floating face side.

Secondary charged particles obtained by irradiating the magnetic head element part with a converged cluster ion beam are detected and displayed on a screen as a secondary charged particle image to set the area to be worked for flattening. The only this area is irradiated with the concentratedly controlled cluster ion beam.

Inventors:

ONO SHIGERU
MIZUMURA MICHINOBU
FURUSAWA KENJI
SASAKI SHINJI

Application Number:

JP2002008157A

Publication Date:

July 31, 2003

Filing Date:

January 17, 2002

Export Citation:

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Assignee:

HITACHI LTD

International Classes:

B23K15/00; G11B5/31; (IPC1-7): G11B5/31; B23K15/00

Attorney, Agent or Firm:

Sakuta Yasuo

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