Title:
薄膜製造方法
Document Type and Number:
Japanese Patent JP4205565
Kind Code:
B2
Inventors:
Ken Masuda
Hiroshi Nishioka
Kajinuma Masahiko
Kiichi Yamada
Masaki Uematsu
Zhou Benkou
Hiroshi Nishioka
Kajinuma Masahiko
Kiichi Yamada
Masaki Uematsu
Zhou Benkou
Application Number:
JP2003403975A
Publication Date:
January 07, 2009
Filing Date:
December 03, 2003
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
C23C16/455; H01L21/316
Domestic Patent References:
| JP2003332539A | ||||
| JP2001127258A | ||||
| JP2001234343A | ||||
| JP2003218325A | ||||
| JP2002367985A | ||||
| JP11233733A |
Attorney, Agent or Firm:
Kiyoshi Higashida
Masaaki Yamashita
Masaaki Yamashita
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