PURPOSE: To reduce the defective conveyance of a thin film and to improve the yield in substrate manufacture by providing respective means of conveying a thin film peeled off from a substrate and held in an interposed state in the direction of the upper part of the substrate and successively conveying the above thin film in the direction intersecting the conveyance direction of the substrate.

CONSTITUTION: A part of a thin film sticked to a substrate is peeled off by using a thin film-raising device 3 and a fluid-blowing device 4. The peeled thin film is held between a fixed conveyance belt 6A and a movable conveyance belt 6B, and this thin film is conveyed in the above state in the direction of the upper part of the substrate on the surface side, while being peeled off from the substrate. The thin film is introduced in the directions of guide members 6Ca, 6Cb and fed into a second conveyance device 6D and conveyed in the direction intersecting the conveyance direction of the substrate.