Title:
THIN FILM PIEZO-ELECTRIC RESONATOR AND THIN FILM PIEZO-ELECTRIC FILTER
Document Type and Number:
Japanese Patent JP2006013839
Kind Code:
A
Abstract:
To provide a material selecting method, a resonator structure for frequency regulating accurately parallel resonators for constituting a thin film piezo-electric filter, and the thin film piezo-electric filter using it.
The thin film piezo-electric resonator includes a pizeo-electric thin film, a lower electrode and an upper electrode formed to sandwich the piezo-electric thin film, and a frequency regulating film provided in contact with the lower electrode or the upper electrode. The acoustic impedance of the frequency regulating film is smaller than that of the lower electrode or the upper electrode in contact with the frequency regulating film.
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Inventors:
IWASHITA KAZUKI
TANAKA KENSUKE
MARUYAMA TAKUYA
KIMURA HIROBUMI
NISHIMURA KOSUKE
TANAKA KENSUKE
MARUYAMA TAKUYA
KIMURA HIROBUMI
NISHIMURA KOSUKE
Application Number:
JP2004187362A
Publication Date:
January 12, 2006
Filing Date:
June 25, 2004
Export Citation:
Assignee:
UBE INDUSTRIES
International Classes:
H03H9/17; H01L41/09; H01L41/187; H01L41/22; H01L41/253; H01L41/29; H03H9/02; H03H9/58
Domestic Patent References:
| JP2004104449A | 2004-04-02 | |||
| JP2003037469A | 2003-02-07 | |||
| JP2003347883A | 2003-12-05 | |||
| JP2001089236A | 2001-04-03 |
Other References:
日本学術振興会弾性は素子技術第１５０委員会, 弾性波素子技術ハンドブック, JPN7009003342, 30 November 1991 (1991-11-30), JP, pages １３０, ISSN: 0001367432