Title:
THIN FILM PIEZOELECTRIC ACTUATOR
Document Type and Number:
Japanese Patent JP2005260208
Kind Code:
A
Abstract:
To provide a thin film piezoelectric actuator having a stable structure which can be easily controlled, has a wide driving range and a low driving voltage.
In a thin film piezoelectric actuator of a double-clamped beam structure having a plurality of driving parts connected in a manner of reversed polarities, two or more via holes are formed perpendicularly to the driving shaft of the actuator in the piezoelectric film, and in each area of the via holes, a first upper electrode and a second lower electrode, or the second upper electrode and the first lower electrode, are overlapped and connected.
Inventors:
KAWAKUBO TAKASHI
OHARA RYOICHI
ONO TOMIO
NAGANO TOSHIHIKO
ABE KAZUHIDE
NISHIGAKI MICHIHIKO
SANO KENYA
YASUMOTO YASUAKI
OHARA RYOICHI
ONO TOMIO
NAGANO TOSHIHIKO
ABE KAZUHIDE
NISHIGAKI MICHIHIKO
SANO KENYA
YASUMOTO YASUAKI
Application Number:
JP2005003370A
Publication Date:
September 22, 2005
Filing Date:
January 11, 2005
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
H01L41/09; H01G7/06; H01L41/053; H01L41/08; H01L41/18; H01L41/187; H01L41/22; H01L41/29; H01L41/316; (IPC1-7): H01L41/09; H01L41/18; H01L41/187; H01L41/22
Domestic Patent References:
| JP2002191181A | 2002-07-05 | |||
| JP2004111939A | 2004-04-08 | |||
| JPH09148643A | 1997-06-06 |
Attorney, Agent or Firm:
Masahiko Hinataji