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Patent Searching and Data


Title:
THIN FILM PIRANI VACUUM SENSOR AND VACUUM MEASURING DEVICE USING IT
Document Type and Number:
Japanese Patent JP2007147344
Kind Code:
A
Abstract:

To provide a thin film Pirani vacuum sensor having high sensitivity in a high band from a high vacuum pressure to a low vacuum pressure which is lower by almost one atmospheric pressure, and a vacuum measuring device.

At least one heater and one or a plurality of temperature sensors are provided on one thin film 10 thermally separated from a substrate or on a divided thin film, and a projection part is provided on a heat sink so as to form an aperture wherein the distance from a heated thin film part to the heat sink is in the range of 0.1 to 10 μm, and heat transfer is performed from the thin film to the heat sink through the narrow aperture. The vacuum measuring device using the sensor is also provided.


Inventors:
KIMURA MITSUTERU
Application Number:
JP2005339681A
Publication Date:
June 14, 2007
Filing Date:
November 25, 2005
Export Citation:
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Assignee:
KIMURA MITSUTERU
International Classes:
G01L21/12