Title:
THIN FILM PRODUCTION METHOD
Document Type and Number:
Japanese Patent JP3932458
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method of producing a ZnO thin film in which a c-axis is oriented in a plane over a wide area.
SOLUTION: A ZnO target 28 which is the raw material of the thin film is sputtered using a magnetron sputtering device to form the flow of the raw material (raw material flow) from a cathode 23 to an anode 24 in a plasma. The density of the raw material flow is high in a central part, and the density lowers as deviating from the center. A substrate 20 is fixed slantingly to a central axis in a position deviating from the central axis of a region 30 in which the raw material flow is formed. Thereby, a temperature gradient is naturally formed on the substrate 20, and thus the c-axis of the ZnO thin film deposited on the substrate 20 is oriented to the direction of temperature gradient in a plane. Further, the area in which the c-axis is uniformly oriented in the plane enlarges more than heretofore by fixing the substrate 20 slantingly to the raw material flow.
Inventors:
Yoshiaki Watanabe
Takahiko Yanagiya
Takahiko Yanagiya
Application Number:
JP2004269087A
Publication Date:
June 20, 2007
Filing Date:
September 16, 2004
Export Citation:
Assignee:
School corporation Doshisha
International Classes:
C30B23/08; C23C14/08; C23C14/35; C23C14/54; C30B29/16; H01L21/316; H01L41/18; H01L41/316; H01L41/39
Domestic Patent References:
| JP3561745B2 |
Other References:
T. Yanagitani et al.,Characterization of (11-20) Textured ZnO Films Fabricated by RF Magnetron Sputtering,Jpn. J. Appl. Phys. ,日本,The Japan Society of Applied Physics,2004年 5月28日,vol. 43, No. 5B,pp. 3004-3007
N. Yokokawa et al. ,Love-type surface-acoustic waves propagating in amorphous iron-boron films with multilayer structure,J. Appl. Phys.,米国,American Institute of Physics,1992年 7月15日,vol. 72, No. 2,pp. 360-366
N. Yokokawa et al. ,Love-type surface-acoustic waves propagating in amorphous iron-boron films with multilayer structure,J. Appl. Phys.,米国,American Institute of Physics,1992年 7月15日,vol. 72, No. 2,pp. 360-366
Attorney, Agent or Firm:
Ryouhei Kobayashi