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Title:
THIN-FILM STRAIN GAGE DEVICE AND MANUFACTURE THEREOF
Document Type and Number:
Japanese Patent JPS60181602
Kind Code:
A
Inventors:
BRINGMANN UDO (DE)
DOESSEL OLAF (DE)
GERSTENBERG KLAUS (DE)
KUERSTEN GERHARD (DE)
ORLOWSKI REINER (DE)
SCHOEN DETLEF (DE)
Application Number:
JP1415785A
Publication Date:
September 17, 1985
Filing Date:
January 28, 1985
Export Citation:
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Assignee:
PHILIPS' GLOEILAMPENFABRIEKEN NV
International Classes:
G01B7/16; C23C14/34; C23C16/509; H01J37/32; H01J37/34; H01L21/00; (IPC1-7): G01B7/18
Domestic Patent References:
JPS58118930A
JPS57115557A



 
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