Title:
薄膜トランジスタ及びその製造方法
Document Type and Number:
Japanese Patent JP5238994
Kind Code:
B2
Abstract:
The core metal of a protein such as ferritin is used as a nucleus for crystallizing a silicone thin film and then the thus crystallized film is employed in the channel part of a thin-film transistor. By aligning the protein on the surface of amorphous silicone and heating, the crystallinity is controlled. In the case of ferritin, the core diameter of the protein is 7 mm. That is, this protein is highly even in size (i.e., the metal content). Thus, the amount of the protein to be deposited on the amorphous silicone surface can be accurately controlled by controlling the protein core density. Furthermore, the type of the core metal can be altered by chemical reactions and the above method is applicable not only to amorphous silicone but also to amorphous films of various types such as germanium. Thus, the amount of nickel required in crystallization is controlled by using a protein. Moreover, the distribution density of the nickel core is controlled to thereby conduct crystallization at a desired crystal size.
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Inventors:
Yukiharu Uraoka
Takashi Fuyuki
Hiroya Kirimura
Takashi Fuyuki
Hiroya Kirimura
Application Number:
JP2007512753A
Publication Date:
July 17, 2013
Filing Date:
March 28, 2006
Export Citation:
Assignee:
Nara Institute of Science and Technology
International Classes:
H01L21/20; H01L21/336; H01L29/786
Domestic Patent References:
| JP2005200425A | 2005-07-28 | |||
| JPH08148426A | 1996-06-07 | |||
| JP2005200425A | 2005-07-28 | |||
| JPH08148426A | 1996-06-07 |
Foreign References:
| WO2004033366A1 | 2004-04-22 | |||
| WO2004033366A1 | 2004-04-22 |
Attorney, Agent or Firm:
Keiichi Ogura
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