Title:
THIN-FILM TRANSISTOR SUBSTRATE FOR LIQUID-CRYSTAL DISPLAY DEVICE AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JP3230669
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a TFT substrate structure, wherein the light incidence to the TFT(thin-film transistor) channel part is almost entirely prevented.
SOLUTION: A lower-part light-shielding film 3 formed on a transparent insulating substrate 1, a thin-film transistor(TFT) 12 formed above the lower- part light-shielding film, and an upper-part light-shielding film 14 formed above the thin-film transistor, are provided. Here, in order that at least either the lower-part light-shielding film 3 or the upper-part light-shielding film 14 extend in the side-surface direction of channel part of the TFT 12, a recessed part 2, for example, is provided on the substrate 1, the lower-part light-shielding film 3 is formed over the entire inside wall surface of the recessed part 2, and the channel part of TFT is embedded in the recessed part formed on the lower-part light-shielding film.
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Inventors:
Kazumi Hirata
Application Number:
JP33583498A
Publication Date:
November 19, 2001
Filing Date:
November 26, 1998
Export Citation:
Assignee:
NEC
International Classes:
H01L29/786; G02B5/00; G02F1/1335; G02F1/136; G02F1/1368; (IPC1-7): H01L29/786; G02F1/1368
Domestic Patent References:
| JP5267671A | ||||
| JP4286371A | ||||
| JP682829A | ||||
| JP6130406A | ||||
| JP200091581A |
Attorney, Agent or Firm:
Nobuyuki Kaneda (2 others)