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Title:
薄膜トランジスタと、その製造方法と、薄膜トランジスタを用いた電子機器
Document Type and Number:
Japanese Patent JP5318865
Kind Code:
B2
Inventors:
Tetsu Saitoh
Takaaki Ueda
Kazunori Komori
Sorayoshi Hotta
Application Number:
JP2010514360A
Publication Date:
October 16, 2013
Filing Date:
May 26, 2009
Export Citation:
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Assignee:
Panasonic Corporation
International Classes:
H01L29/786; G02F1/1368; H01L21/20; H01L21/28; H01L21/336; H01L29/417
Domestic Patent References:
JP2002124683A2002-04-26
JPH09260670A1997-10-03
JP2009152346A2009-07-09
JP2006179878A2006-07-06
JP2007317934A2007-12-06
JP2005038981A2005-02-10
JP2002341375A2002-11-27
JPH1070077A1998-03-10
JPH09246564A1997-09-19
Attorney, Agent or Firm:
Hiromori Arai



 
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